Subhajit Mohanty Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Subhajit Mohanty returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Investigation and optimization of HfO2 gate dielectric on N-polar GaN: Impact of surface treatments, deposition, and annealing conditions |