Muhammad Adi Negara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Muhammad Adi Negara returned 2 record(s).

Number	Title
1	The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
2	Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices