Yung-Chuan Chuang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yung-Chuan Chuang returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing |