Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

M. Haslinger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Haslinger returned 1 record(s).

NumberTitle
1Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application