Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Derryl Allman Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Derryl Allman returned 2 record(s).

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
2Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor