Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Jeong-Pyo Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jeong-Pyo Lee returned 1 record(s).

NumberTitle
1In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices