Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yi-Ping Lin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yi-Ping Lin returned 1 record(s).

NumberTitle
1Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure