Gilbert B. Rayner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gilbert B. Rayner returned 2 record(s).

Number	Title
1	Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
2	Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride