Seokhwan Bang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seokhwan Bang returned 4 record(s).

Number	Title
1	Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
2	Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
3	The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
4	Pt Nanocrystals Embedded in Remote Plasma Atomic-Layer-Deposited HfO2 for Nonvolatile Memory Devices