Choong-Ki Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Choong-Ki Kim returned 2 record(s).

Number	Title
1	Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
2	Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors