Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

D. Frank Ogletree Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. Frank Ogletree returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition for plasmonic TiN