Dong-Jin Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dong-Jin Park returned 3 record(s).

Number	Title
1	The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
2	Fabrication of self-aligned TFTs with a ultra-low temperature polycrystalline silicon process on metal foils
3	Stabilization of Al₂O₃ gate oxide on plastic substrate for low temperature poly-silicon by in situ plasma treatment