Mervi Paulasto-Kröckel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mervi Paulasto-Kröckel returned 3 record(s).

Number	Title
1	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
2	Atomic layer deposition of AlN from AlCl₃ using NH₃ and Ar/NH₃ plasma
3	Blistering mechanisms of atomic-layer-deposited AlN and Al₂O₃ films