Inductively coupled plasma sources from Plasma ALD, LLC.


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Yu-Chuan Shih Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Chuan Shih returned 1 record(s).

NumberTitle
1CeO2 Doping of Hf0.5Zr0.5O2 Thin Films for High Endurance Ferroelectric Memories