Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

H. J. Higuera-Valenzuela Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. J. Higuera-Valenzuela returned 1 record(s).

NumberTitle
1Gallium nitride thin films by microwave plasma-assisted ALD