Lilit Ghazaryan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lilit Ghazaryan returned 4 record(s).

Number	Title
1	Nanoporous SiO₂ thin films made by atomic layer deposition and atomic etching
2	Composite materials and nanoporous thin layers made by atomic layer deposition
3	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
4	Comparative study of ALD SiO₂ thin films for optical applications