Inductively coupled plasma sources from Plasma ALD, LLC.


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Yan Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yan Chen returned 1 record(s).

NumberTitle
1Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System