J. Ruud van Ommen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Ruud van Ommen returned 2 record(s).

Number	Title
1	Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
2	Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films