Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Bo-Eun Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bo-Eun Park returned 1 record(s).

NumberTitle
1Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2