Jean-Philippe Sarrette Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jean-Philippe Sarrette returned 1 record(s).
| Number | Title |
|---|---|
| 1 | The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films |