Markus Heyne Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markus Heyne returned 3 record(s).

Number	Title
1	WS₂ transistors on 300 mm wafers with BEOL compatibility
2	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
3	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S