Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yong-Ho Noh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong-Ho Noh returned 1 record(s).

NumberTitle
1Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride