Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

James C. Sturm Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by James C. Sturm returned 2 record(s).

NumberTitle
1Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications
2Oxide TFT LC Oscillators on Glass and Plastic for Wireless Functions in Large-Area Flexible Electronic Systems