Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Ziyi Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ziyi Zhang returned 1 record(s).

NumberTitle
1On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR