Inductively coupled plasma sources from Plasma ALD, LLC.


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A. B. Fadjie-Djomkam Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. B. Fadjie-Djomkam returned 1 record(s).

NumberTitle
1Impact of oxygen plasma postoxidation process on Al2O3/n-In0.53Ga0.47As metal-oxide-semiconductor capacitors