Inductively coupled plasma sources from Plasma ALD, LLC.


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Yong Hwan Na Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong Hwan Na returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors