R. D. Long Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. D. Long returned 2 record(s).

Number	Title
1	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
2	Oxide Charge Engineering of Atomic Layer Deposited AlO_xN_y/Al₂O₃ Gate Dielectrics: A Path to Enhancement Mode GaN Devices