Jaclyn K. Sprenger Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaclyn K. Sprenger returned 2 record(s).

Number	Title
1	Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
2	Electron-enhanced atomic layer deposition of silicon thin films at room temperature