Solveig Anders Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Solveig Anders returned 2 record(s).

Number	Title
1	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
2	Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma