Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Qing Peng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qing Peng returned 1 record(s).

NumberTitle
1Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment