Inductively coupled plasma sources from Plasma ALD, LLC.


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Dina H. Triyoso Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dina H. Triyoso returned 3 record(s).

NumberTitle
1Challenges in spacer process development for leading-edge high-k metal gate technology
2Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
3Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration