Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J.Y. Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J.Y. Lee returned 1 record(s).

NumberTitle
1Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition