Aidan J. Quinn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aidan J. Quinn returned 2 record(s).

Number	Title
1	High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
2	Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology