I. S. Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by I. S. Kim returned 2 record(s).

Number	Title
1	Electrical properties of Ga₂O₃-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
2	Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition