Merijn E. Donders Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Merijn E. Donders returned 7 record(s).

Number	Title
1	Remote Plasma ALD of Platinum and Platinum Oxide Films
2	Remote Plasma Atomic Layer Deposition of Co₃O₄ Thin Films
3	Co₃O₄ as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
4	Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
5	Remote Plasma Atomic Layer Deposition of Co₃O₄ Thin Film
6	Atomic Layer Deposition of LiCoO₂ Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
7	Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO₂