Guo-Yong Fang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Guo-Yong Fang returned 3 record(s).

Number	Title
1	Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
2	Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
3	Self-catalysis by aminosilanes and strong surface oxidation by O2 plasma in plasma-enhanced atomic layer deposition of high-quality SiO2