Inductively coupled plasma sources from Plasma ALD, LLC.


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M. Hörteis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Hörteis returned 1 record(s).

NumberTitle
1Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells