Tetsuya Sato Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tetsuya Sato returned 3 record(s).

Number	Title
1	Formation of Al₂O₃ Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
2	Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
3	Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition