Inductively coupled plasma sources from Plasma ALD, LLC.


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Alexander B. Nepomnyashchii Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander B. Nepomnyashchii returned 1 record(s).

NumberTitle
1Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization