Songyan Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Songyan Chen returned 3 record(s).

Number	Title
1	An improvement of HfO₂/Ge interface by in situ remote N₂ plasma pretreatment for Ge MOS devices
2	Surface Passivation of Silicon Using HfO₂ Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
3	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD