Zhengduo Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zhengduo Wang returned 3 record(s).

Number	Title
1	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al₂O₃ Thin Films
2	Plasma-Assisted ALD of an Al₂O₃ Permeation Barrier Layer on Plastic
3	Atomic Layer Deposition Al₂O₃ Thin Films in Magnetized Radio Frequency Plasma Source