A. Varpula Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Varpula returned 6 record(s).

Number	Title
1	Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
2	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
3	Properties of AlN grown by plasma enhanced atomic layer deposition
4	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
6	Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces