A. Varpula Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Varpula returned 6 record(s).

NumberTitle
1Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
2High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
3Properties of AlN grown by plasma enhanced atomic layer deposition
4Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
6Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

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