Debbie G. Senesky Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Debbie G. Senesky returned 3 record(s).

Number	Title
1	DC characteristics of ALD-grown Al₂O₃/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
2	Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
3	Capacitance-voltage characteristics of gamma irradiated Al₂O₃, HfO₂, and SiO₂ thin films grown by plasma-enhanced atomic layer deposition