Inductively coupled plasma sources from Plasma ALD, LLC.


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Cao Guan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cao Guan returned 1 record(s).

NumberTitle
1Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode