Mikko Laitinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko Laitinen returned 3 record(s).

Number	Title
1	Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
2	Properties of AlN grown by plasma enhanced atomic layer deposition
3	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF₆ based plasmas