Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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R. Delamare Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Delamare returned 2 record(s).

NumberTitle
1Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
2Passivation effects of atomic-layer-deposited aluminum oxide