Seung Wook Ryu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung Wook Ryu returned 2 record(s).

Number	Title
1	Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
2	Influence of Substrates on the Nucleation and Growth Behaviors of Ge₂Sb₂Te₅ Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition