Jerry W. Johnson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jerry W. Johnson returned 2 record(s).

Number	Title
1	GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
2	High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors