Inductively coupled plasma sources from Plasma ALD, LLC.


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Nelson Y. Garces Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nelson Y. Garces returned 2 record(s).

NumberTitle
1Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
2Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications