Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Loïc Assaud Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Loïc Assaud returned 2 record(s).

NumberTitle
1Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
2Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition